課程資訊
課程名稱
化合物半導體檢測技術
Compound Semiconductor Characterization Technologies 
開課學期
101-2 
授課對象
電機資訊學院  光電工程學研究所  
授課教師
馮哲川 
課號
OE5059 
課程識別碼
941EU0590 
班次
 
學分
全/半年
半年 
必/選修
選修 
上課時間
星期四5,6,7(12:20~15:10) 
上課地點
博理212 
備註
本課程以英語授課。
總人數上限:30人 
 
課程簡介影片
 
核心能力關聯
核心能力與課程規劃關聯圖
課程大綱
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課程概述

[A] Introduction to compound semiconductor engineering for various applications
Compound semiconductors form the most (or many) of fundamental materials in modern optoelectronics/electronic devices, micro- and nano-structures as well as their modules in advanced electronic and optoelectronic systems. Characterization is the key step to produce these advanced materials, no matter what they are made by bulk growth, deposition, epitaxy or any types of material growth techniques. The identification via various characterization technologies, not by only one or few ones is really necessary. Various techniques, basic and advanced, are introduced in this course.
[B] Structure characterization
B1-X-ray diffraction (XRD): basic theory-Bragg Law, history developments, Powder XRD, double crystal XRD, high resolution XRD (via 3-5 crystals), Reciprocal maps, XRD fitting programs for single and multiple layers as well as quantum well (QW) or superlattice (SL) structures.
B2-Electron microscopy: scanning electron microscopy (SEM), transmission electron microscopy (TEM), high resolution (HR) TEM.
[C] Electrical Characterization: Hall effect and measurement of resistivity and carrier concentration, IV and CV, electrochemical etching CV depth profile
[D] Optical Characterization: optical transmission (OT), optical reflectance (OR), Photoluminescence (PL), Photoluminescence excitation (PLE), time resolved (TR) PL, Raman scattering (RS), Fourier transform infrared (FTIR) spectroscopy, Photoreflectance (PR), electroreflectance (ER), Electronluminescence (EL), cathodoluminescence (CL), low-temperature (LT) and high-T systems and application to all optical characterization techniques.
[E] Surface science Characterization: X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), secondary ion mass spectroscopy (SIMS), depth profile measurements.
[F] Nuclear technological Characterization: Rutherford backscattering (RBS), ion channeling, PIXS.
[G] Synchrotron radiation (SR) technological Characterization: high 

課程目標
help students to understand various characterization technologies and able to handle their basic concepts and knowledges. 
課程要求
3) 成績評量方式 : Homework (30%), mid-term exam (30%), final exam (40%)
4) 預修課程: 無.
 
預期每週課後學習時數
 
Office Hours
 
指定閱讀
 
參考書目
Textbook: no textbooks. References are provided in the course. 
評量方式
(僅供參考)
   
課程進度
週次
日期
單元主題
無資料